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APPLICATIONSWafergard® MAX In-line PTFE Gas Filters Applications
- Compatible with all classes of semiconductor process gases
- Compatible with general nitrogen and CDA applications
SPECIFICATIONS
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Performance Data
Product Specifications
| Materials |
Filter element |
Hydrophobic PTFE membrane supported by molded PFA structures |
| |
Housing |
Electropolished low sulfur 316L stainless housing |
| Downstream cleanliness |
Particles |
Less than 0.03 particles/liter (<1 particle/ft3) greater than 0.01 μm |
| |
Volatiles (Silver) |
<10 ppb H2O and O2. Below LDL THC (lower detection limit is 5 ppb) |
| Removal rating |
≥0.0015 μm |
| Surface finish interior |
WGMX (Bronze) MB XXXX |
≤20 μin Ra |
| |
WGMX (Silver/Bronze Plus) MS XXX/XXX |
≤7 μin Ra |
| Helium leak rating |
Qualified |
2 x 10-10 atm-cc/sec |
| |
Tested |
1 x 10-9 atm-cc/sec |
Operating conditions
|
Maximum inlet pressure
|
Silver and Bronze Plus 1⁄4" and 1⁄2" VCR® compatible fittings: 7.0 MPa (70 bar, 1015 psig) |
| |
|
Bronze 1⁄4" and 1⁄2" VCR compatible fittings: 6.0 MPa (60 bar, 870 psig) |
| |
|
Bronze and Bronze Plus 1⁄4", 3⁄8" and 1⁄2" Swagelok® compatible fitting: 6.0 MPa (60 bar, 870 psig) |
| |
Maximum forward differential pressure |
7 bar (102 psid) |
| |
Maximum reverse differential pressure |
2.5 bar (36 psid) |
| |
Maximum operating temperature |
120°C (248°F) |
| Flow rating |
Refer to performance data |
| Warranty |
Bronze |
1 year |
| |
Silver |
3 years |
| Particle retention |
Greater than 99.9999999% (9 LRV) removal of all particles (referenced at the most penetrating particle size) |
REFERENCE MATERIALSProduct DocumentationPUBLISHED JUN 19, 2024Data SheetWafergard® MAX In-line PTFE Gas Filters
Download PDF319.0 kB
PUBLISHED JUN 19, 2024Data SheetWafergard® MAX In-line PTFE Gas Filters - A4
Download PDF319.0 kB
PUBLISHED NOV 2, 2020Manual and GuideWafergard® Gas Filter Compatibility Guide
Download PDF102.3 kB
PART NUMBERSWafergard® MAX In-line PTFE Gas Filters Part Numbers
| PART NUMBER |
FITTING SIZE AND TYPE |
LENGTH |
| WGMXMBPRF2 |
1/4" male VCR® compatible inlet, 1/4" female VCR® compatible outlet |
141.2 mm (5.6") |
| WGMXMBRR2 |
1/4" male VCR® compatible |
127 mm (5.00") |
| WGMXMBRR4 |
1/2" male VCR® compatible |
127 mm (5.00") |
| WGMXMBSS2 |
1/4" Swagelok® compatible |
112.7 mm (4.44") |
| WGMXMBSS3 |
3/8" Swagelok® compatible |
117.9 mm (4.64) |
| WGMXMBSS4 |
1/2" Swagelok® compatible |
118.7 mm (4.67") |
| WGMXMPRR2 |
1/4" male VCR® compatible |
127 mm (5.00") |
| WGMXMPRR4 |
1/2" male VCR® compatible |
127 mm (5.00") |
| WGMXMPSS2 |
1/4" Swagelok® compatible |
112.7 mm (4.44") |
| WGMXMPSS3 |
3/8" Swagelok® compatible |
117.9 mm (4.64) |
| WGMXMPSS4 |
1/2" Swagelok® compatible |
118.7 mm (4.67") |
| WGMXMSBW2 |
1/4" Butt weld tube |
133.4 mm (5.25") |
| WGMXMSBW3 |
3/8" butt weld tube |
133.4 mm (5.25") |
| WGMXMSBW4 |
1/2" Butt weld tube |
133.4 mm (5.25") |
| WGMXMSRR2 |
1/4" male VCR® compatible |
127 mm (5.00") |
| WGMXMSRR4 |
1/2" male VCR® compatible |
127 mm (5.00") |